JPH0441178Y2 - - Google Patents

Info

Publication number
JPH0441178Y2
JPH0441178Y2 JP12057986U JP12057986U JPH0441178Y2 JP H0441178 Y2 JPH0441178 Y2 JP H0441178Y2 JP 12057986 U JP12057986 U JP 12057986U JP 12057986 U JP12057986 U JP 12057986U JP H0441178 Y2 JPH0441178 Y2 JP H0441178Y2
Authority
JP
Japan
Prior art keywords
plasma
diameter
support
cylindrical electrode
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12057986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327470U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12057986U priority Critical patent/JPH0441178Y2/ja
Publication of JPS6327470U publication Critical patent/JPS6327470U/ja
Application granted granted Critical
Publication of JPH0441178Y2 publication Critical patent/JPH0441178Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP12057986U 1986-08-06 1986-08-06 Expired JPH0441178Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12057986U JPH0441178Y2 (en]) 1986-08-06 1986-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12057986U JPH0441178Y2 (en]) 1986-08-06 1986-08-06

Publications (2)

Publication Number Publication Date
JPS6327470U JPS6327470U (en]) 1988-02-23
JPH0441178Y2 true JPH0441178Y2 (en]) 1992-09-28

Family

ID=31009024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12057986U Expired JPH0441178Y2 (en]) 1986-08-06 1986-08-06

Country Status (1)

Country Link
JP (1) JPH0441178Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2682221B2 (ja) * 1990-09-20 1997-11-26 株式会社村田製作所 ディスクリミネータ

Also Published As

Publication number Publication date
JPS6327470U (en]) 1988-02-23

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